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德國SUSS LabSpin6/ LabSpin8 勻膠機
- 品牌：德國suss
- 型號： LabSpin6/ LabSpin8
- 產(chǎn)地：歐洲 德國
- 供應(yīng)商報價：面議
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香港壘為信息科技實業(yè)有限公司
更新時間：2020-10-26 11:04:52 -
銷售范圍售全國
入駐年限第6年
營業(yè)執(zhí)照已審核
- 同類產(chǎn)品光刻機(6件)
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聯(lián)系方式：400-822-6768
聯(lián)系我們時請說明在儀器網(wǎng)（www.vietnamtrade.org）上看到的!
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詳細介紹
Substrates
§ LabSpin 6: up to 150mm round or 100mm square substrates§ LabSpin 8: up to 200mm round or 150mm square substrates
Motor
§ Brushless E-motor with collection glass beaker§ Spin speed: min 50 rpm
max 8000 rpm (with 200mm chuck)
§ Acceleration: max 3000 rpm/s
Controller
§ Graphical User Interface: Touch panel with color display§ Number programmable recipes: max 200
§ Step number per recipe: max 40
§ Loop function: repeats a set of process stepCoater Options
§ Cover plate for additional functions
§ Resist dispense systems
é Pressurized syringe dispense
é Full automatic dispense system
§ Edge Bead Removal (EBR)
Developer Options
§ Cover plate for additional functions§ Developer dispense option
§ DI-water dispense option
§ Nitrogen Drying option
滬公網(wǎng)安備 31011502008050號