卷對(duì)卷柔性薄膜沉積設(shè)備 MVS

卷對(duì)卷柔性薄膜沉積設(shè)備

Cassette houses flexible material

卷筒用于裝載柔性襯底材料

Cassette transported from one process chamber to another via a robotic handler

制備薄膜時(shí)，卷筒可由真空機(jī)器手從一個(gè)腔室輸送至另一個(gè)腔室

Advantages 此沉積系統(tǒng)的優(yōu)點(diǎn)

- Eliminates cross-contamination 在制備多層膜器件時(shí)消除了交互摻雜影響

- Flexibility to adjust parameters on any part of the process. 制備薄膜時(shí)，能靈活控制各種運(yùn)轉(zhuǎn)沉積參數(shù)

- Down time reduced, i.e. each chamber can be serviced independently 因每個(gè)腔室可單獨(dú)維護(hù)，減少了停機(jī)非運(yùn)轉(zhuǎn)時(shí)間

Reel to Reel Cassette Cluster tools

Cluster tool w/ 8 port locations

具有8個(gè)腔室的團(tuán)簇型沉積系統(tǒng)

15cm and 30cm webwidth

柔性襯底的寬度可從15cm至30cm

Computer controlled

可完全由電腦程序控制操作運(yùn)行

PECVD, HWCVD and Sputter capability

制備方式包括等離子體和熱絲化學(xué)氣相沉積，及濺射

(US patent #6,258,408B1)

（本產(chǎn)品獲美國(guó)ZL#6,258,408B1）