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非接觸式薄層電阻測(cè)試儀
- 品牌：昊量/auniontech
- 型號(hào)： 03
- 產(chǎn)地：上海 徐匯區(qū)
- 供應(yīng)商報(bào)價(jià)：面議
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上海昊量光電設(shè)備有限公司
更新時(shí)間：2025-04-27 13:46:07 -
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入駐年限第10年
營(yíng)業(yè)執(zhí)照已審核
- 同類產(chǎn)品電渦流檢測(cè)(4件)
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產(chǎn)品特點(diǎn)
- 非接觸測(cè)量方塊電阻，高速，高精度，低備樣需求
詳細(xì)介紹
產(chǎn)品介紹：
非接觸式薄層電阻測(cè)試儀
昊量光電新推出用于導(dǎo)電薄膜和薄金屬層方塊電阻測(cè)量的非接觸式方阻測(cè)量?jī)xEddyCus TF Series，這款非接觸式方塊電阻測(cè)量?jī)x可以非接觸式實(shí)時(shí)測(cè)量，對(duì)導(dǎo)電薄膜和金屬方塊電阻精確測(cè)量，表征已被隱藏和封裝的導(dǎo)電層，并把測(cè)量數(shù)據(jù)保存和導(dǎo)出。
非接觸式方塊電阻測(cè)試儀主要測(cè)試對(duì)象：
鍍膜建筑玻璃，如LowE
顯示器，觸摸屏和平板顯示器
OLED和LED
智能玻璃
石墨烯層
光伏晶圓和電池
半導(dǎo)體晶片
金屬化層和晶圓金屬化
電池電極
導(dǎo)電涂布紙和導(dǎo)電紡織品
非接觸式單點(diǎn)方阻測(cè)試儀EddyCus TF Lab 2020SR
EddyCus TF Lab 2020SR是非接觸式單點(diǎn)薄層電阻測(cè)量系統(tǒng)。該裝置包含一個(gè)渦流傳感器組，感應(yīng)弱電流到導(dǎo)電薄膜和材料。試樣中的感應(yīng)電流產(chǎn)生與測(cè)量對(duì)象的片電阻相關(guān)的電磁場(chǎng)。電渦流技術(shù)不依賴于表面特征或形貌。此外，它不需要如已知的2或4點(diǎn)探針測(cè)試(2PP, 4PP)或霍爾效應(yīng)或范德波測(cè)量一樣進(jìn)行任何形式的充分的樣品接觸或備樣。它既不需要設(shè)置測(cè)試結(jié)構(gòu)，也不受表面粗糙度或非導(dǎo)電封裝或鈍化層的影響。此外，測(cè)量不會(huì)對(duì)被測(cè)薄膜產(chǎn)生物理影響。渦流儀器不存在機(jī)械磨損，使用壽命長(zhǎng)。它的獨(dú)立性與接觸質(zhì)量和它的高速允許實(shí)現(xiàn)高重復(fù)性和準(zhǔn)確性，有利于在研發(fā)和測(cè)試實(shí)驗(yàn)室的各種薄膜的系統(tǒng)質(zhì)量保證。EddyCus工具可以由具有各種數(shù)據(jù)記錄和導(dǎo)出功能的SURAGUS軟件驅(qū)動(dòng)，也可以由SURAGUS軟件開發(fā)套件驅(qū)動(dòng)的客戶軟件驅(qū)動(dòng)。
軟件和設(shè)備控制：
非常用戶友好的軟件
直觀的觸摸顯示導(dǎo)航
實(shí)時(shí)測(cè)量板材電阻和層厚
軟件輔助手動(dòng)映射選項(xiàng)
各種數(shù)據(jù)保存和導(dǎo)出選項(xiàng)
非接觸式方塊電阻測(cè)試儀產(chǎn)品規(guī)格表
Measurement technology Non-contact eddy current sensor Substrates Foils, glass, wafer, etc. Substrate area 8 inch / 204 mm x 204 mm (open on three sides) Max. sample thickness / sensor gap 3 / 5 / 10 / 25 mm (defined by the thickest sample) Thickness measurement range of metal films (e.g. copper) 2 nm – 2 mm (in accordance with sheet resistance (cf. our calculator)) Device dimensions (w/h/d) 11.4” x 5.5” x 17.5” / 290 mm x 140 mm x 445 mm Weight 10 kg Further available features Sheet resistance measurement / metal thickness monitor VLSR LSR MSR HSR VHSR 6 decades are measurable by one sensor, but with slightly affected accuracy Range [Ohm/sq] 0.0001 – 0.1 0.1 – 10 0.1 – 100 10 – 2000 1,000 – 200,000 Accuracy / Bias ± 1% ± 1 – 3% ± 3 – 5% Repeatability (2σ) < 0.3% < 0.5% < 0.3% VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistanc 非接觸式方阻成像儀EddyCus TF Map 2530SR
EddyCus TF Map 2530SR是一種非接觸式薄層電阻映射系統(tǒng)。該設(shè)備配備了一個(gè)運(yùn)動(dòng)的渦流傳感器，每次掃描可測(cè)量高達(dá)90000 (300 x 300)測(cè)量點(diǎn)的方塊電阻。由于這種技術(shù)不需要與標(biāo)本進(jìn)行物理接觸，該設(shè)備可以在飛行運(yùn)動(dòng)中進(jìn)行測(cè)量。此外，它具有很高的準(zhǔn)確性，因?yàn)樗仟?dú)立于任何接觸質(zhì)量。樣品中測(cè)量點(diǎn)的高密度確保了沒有遺漏任何效果或缺陷。此外，綜合分析功能支持生產(chǎn)和研發(fā)實(shí)驗(yàn)室中各種薄膜的系統(tǒng)質(zhì)量保證。
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產(chǎn)品規(guī)格：
Measurement technology Non-contact eddy current sensor Substrates Wafer, glass, foils etc. Max. scanning area 12 inch / 300 mm x 300 mm (larger upon request) Edge effect correction / exclusion 2 – 10 mm (depending on size, range, setup and requirements) Max. sample thickness / sensor gap 3 / 5 / 10 / 15 mm (defined by the thickest sample) Thickness measurement of metal films (e.g. aluminum, copper) 2 nm – 2 mm (in accordance with sheet resistance ()) Scanning pitch 1 / 2.5 / 5 / 10 / 25 mm (other upon request) Measurement points per time (square shaped samples) 100 measurement points in 0.5 minutes
10,000 measurement points in 3 minutesScanning time 8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch)
12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch)Device dimensions (w/h/d) 31.5” x 19.1” x 33.5” / 785 mm x 486 mm x 850 mm Weight 90 kg Further available features Metal thickness imaging, anisotropy and sheet resistance sensor VLSR LSR MSR HSR VHSR 6 decades are measurable by one sensor, but with slightly affected accuracy Range [Ohm/sq] 0.0001 – 0.1 0.1 – 10 0.1 – 100 10 – 2,000 1,000 – 200,000 Accuracy / Bias ± 1% ± 1 – 3% ± 3 – 5% Repeatability (2σ) < 0.5% < 1% < 0.5% VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance 便攜式方塊電阻測(cè)試儀
EddyCus TF便攜式1010SR專用于工業(yè)環(huán)境中的接觸片電阻測(cè)量。它使各種行業(yè)的手工質(zhì)量保證成為可能。
Measurement technology Eddy current sensor Measurement mode Realtime at constant distance / contact Substrates Glass, foils etc. Substrate sizes Flat samples > 150 mm x 150 mm (6 inch x 6 inch)
Curved editions are available for several applications (windshields etc.)Measurement spot / high sensitivity zone 40 mm diameter (1.6 inch) Power Lithium ion battery up to 20 h Sheet resistance range (five setups available) Type very low: 0.001 – 0.1 Ohm/sq
Type low: 0.04 – 0.1 Ohm/sq
Type standard: 0.3 – 30 Ohm/sq
Type high: 0.3 – 50 Ohm/sq
Type very high: 0.3 – 100 Ohm/sqThickness measurement of thin films (e.g. copper) Additional feature, available range is 5 nm – 500 μm (in accordance with sheet resistance) Emissivity range Additional feature, available range is 0.003 – 0.5 Accuracy (for planar solid surfaces, e.g. glass) 0.001 – 50 Ohm/sq: < 3%
50 – 100 Ohm/sq: < 5%DISPlay 2.8 inch colored touch screen Device dimensions (w/h/d) 3.5” x 7” x 1.9” / 87 mm x 178 mm x 48 mm Weight 340 g Interfaces Bluetooth (optional) + data center
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